A vacuum packaged surface micromachined resonant accelerometer
A vacuum packaged surface micromachined resonant accelerometer
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DOI：
10.1109/jmems.2002.805207
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发表时间：
2002-12-01
影响因子：
2.7
通讯作者：
Montague, S
中科院分区：
文献类型：
--
作者：
Seshia, AA;Palaniapan, M;Montague, S
本文描述了真空封装谐振式加速度计进行静态和动态加速度测试的工作原理。该装置的响应与其在外加时变加速度下的行为的新的分析模型大体一致。测量包括测试传感器的标度因数以及双端音叉振荡器的输出边带功率和噪声底限作为施加的加速频率的函数的测试。谐振式加速度计的分辨率在超过某一特征加速度角频率后，分辨率下降了20分贝/十。桑迪亚国家实验室制造了一个样机，在300赫兹的输入加速频率下，噪声下限为40微克/根赫兹。
This paper describes the operation of a vacuum packaged resonant accelerometer subjected to static and dynamic acceleration testing. The device response is in broad agreement with a new analytical model of its behavior under an applied time-varying acceleration. Measurements include tests of the scale factor of the sensor and the dependence of the output sideband power and the noise floor of the double-ended tuning fork oscillators as a function of the applied acceleration frequency. The resolution of resonant accelerometers is shown to degrade 20 dB/decade beyond a certain characteristic acceleration corner frequency. A prototype device was fabricated at Sandia National Laboratories and exhibits a noise floor of 40 mug/rootHz for an input acceleration frequency of 300 Hz.