Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test
Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test
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DOI：
10.1117/1.oe.53.3.031305
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发表时间：
2013-12
影响因子：
1.3
通讯作者：
P. Su;M. Khreishi;T. Su;R. Huang;M. Dominguez;A. Maldonado;G. Butel;Yuhao Wang;Robert E. Parks;J. Burge
中科院分区：
文献类型：
--
作者：
P. Su;M. Khreishi;T. Su;R. Huang;M. Dominguez;A. Maldonado;G. Butel;Yuhao Wang;Robert E. Parks;J. Burge
摘要。美国亚利桑那大学开发了一种基于偏转法的软件可配置光学测试系统（SCOTS），用于快速、稳健、准确地测量精密非球面和自由曲面。SCOTS使用带有外部停止的相机来实现反向哈特曼测试。以外部相机停止为参考，坐标测量机可用于校准SCOTS测试几何形状，以达到高精度。摄像机的系统误差被仔细调查和控制。相机瞳孔成像像差是消除与外部光圈停止。成像像差和其他固有误差被抑制与n旋转测试。通过直径5 m的大型天气巡天望远镜三级镜和直径8.4 m的巨型麦哲伦望远镜主镜的测量结果，验证了SCOTS测试的性能。结果表明，该方法可作为一种大动态范围、高精度、无零的精密非球面和自由曲面检测方法。SCOTS测试可以达到与传统干涉测试相当的测量精度。
Abstract. A software configurable optical test system (SCOTS) based on deflectometry was developed at the University of Arizona for rapidly, robustly, and accurately measuring precision aspheric and freeform surfaces. SCOTS uses a camera with an external stop to realize a Hartmann test in reverse. With the external camera stop as the reference, a coordinate measuring machine can be used to calibrate the SCOTS test geometry to a high accuracy. Systematic errors from the camera are carefully investigated and controlled. Camera pupil imaging aberration is removed with the external aperture stop. Imaging aberration and other inherent errors are suppressed with an N-rotation test. The performance of the SCOTS test is demonstrated with the measurement results from a 5-m-diameter Large Synoptic Survey Telescope tertiary mirror and an 8.4-m diameter Giant Magellan Telescope primary mirror. The results show that SCOTS can be used as a large-dynamic-range, high-precision, and non-null test method for precision aspheric and freeform surfaces. The SCOTS test can achieve measurement accuracy comparable to traditional interferometric tests.