Room-temperature NH3 sensors with high sensitivity and short response/recovery times

Room-temperature NH3 sensors with high sensitivity and short response/recovery times
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室温 NH3 传感器具有高灵敏度和短响应/恢复时间

DOI:
10.1007/s11434-013-0018-3
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发表时间:
2014-02-01
影响因子:
--
通讯作者:
Hou, Jianhua
Hou, Jianhua
中科院分区:
其他
文献类型:
--
作者:
Liang, Qingcheng;Li, Di;Hou, Jianhua

文献摘要

被引文献

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采用静电共纺法在SiO2/Si衬底上制备了In 2 O3和SnO 2纳米纤维,并在此基础上制备了具有叉指状Pt信号电极的微传感器。传感器总面积为1.36 mm x 0.55 mm,有效面积仅为0.63 mm x 0.55 mm。基于室温下的传感器,获得了优异的NH3传感特性。当传感器暴露于10 ppm的NH3时,灵敏度最高为28。响应时间约为8 s,恢复时间近2 s。不仅具有良好的选择性,而且具有长期稳定性。研究结果不仅表明所制备的微型传感器是一种非常有前途的NH3检测器件,而且为工业化大规模NH3传感器的制备提供了一条可能的途径。
Micro-sensors are fabricated by co-electrospinning In2O3 and SnO2 nanofibers on the substrates of SiO2/Si with interdigitated Pt signal electrodes. The total sensor area is 1.36 mm x 0.55 mm and the active area is only 0.63 mm x 0.55 mm. Excellent NH3 sensing properties are obtained based on the sensors at room temperature. The sensitivity is at most 28 when the sensors are exposed to NH3 of 10 ppm. The response time is 8 s or so and the recovery time is nearly 2 s. Not only fine selectivity, but also long-time stability is obtained. The results not only demonstrate the obtained micro-sensors are very promising devices for NH3 detection, but also show a possible route for large-scale NH3 sensor fabrication at the industrial level.