Multifocal microlens arrays using multilayer photolithography
Multifocal microlens arrays using multilayer photolithography
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DOI：
10.1364/oe.388921
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发表时间：
2020-03-30
期刊：
影响因子：
3.8
通讯作者：
Jeong, Ki-Hun
中科院分区：
文献类型：
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作者：
Bae, Sang-In;Kim, Kisoo;Jeong, Ki-Hun
报道了一种用于扩展景深(DoF)的多焦微透镜阵列(MF-MLA)的多层光刻和热回流微细加工新方法。利用多个光刻掩模的重复光刻技术在单个玻璃晶片上同时制作了不同焦距的微透镜，以确定不同厚度的微柱和多层微柱的同时热回流。微柱的厚度精确控制了微透镜的不同透镜曲率。六角形封装的MF-MLA清晰地显示了透镜直径为200微米时的三种不同焦距：249微米、310微米和460微米，并在单个图像传感器上产生多焦点图像。该方法为开发各种三维(3D)成像应用提供了新的途径，如光场相机或3D医学内窥镜。(C)OSA开放获取出版协议条款下的2020年美国光学学会
We report a new microfabrication method of multifocal microlens arrays (MF-MLAs) for extended depth-of-field (DoF) using multilayer photolithography and thermal reflow. Microlenses of different focal lengths were simultaneously fabricated on a single glass wafer by using repeated photolithography with multiple photomasks to define microposts of different thicknesses and concurrent thermal reflow of multi-stacked microposts. The diverse lens curvatures of MF-MLAs are precisely controlled by the thickness of the micropost. Hexagonally packaged MF-MLAs clearly show three different focal lengths of 249 mu m, 310 mu m, and 460 mu m for 200 mu m in lens diameter and result in multifocal images on a single image sensor. This method provides a new route for developing various three-dimensional (3D) imaging applications such as light-field cameras or 3D medical endoscopes. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement