PRESSURE TRANSDUCER WITH AU-NI THIN-FILM STRAIN-GAUGES
PRESSURE TRANSDUCER WITH AU-NI THIN-FILM STRAIN-GAUGES
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DOI：
10.1109/16.199357
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发表时间：
1993-03-01
影响因子：
3.1
通讯作者：
MUTHUNAYAGAM, AE
中科院分区：
文献类型：
--
作者：
RAJANNA, K;MOHAN, S;MUTHUNAYAGAM, AE
本文研究了以Au-Ni（89：11）薄膜为应变片的压力传感器的特性。讨论了薄膜应变片的后热处理工艺对应变片电阻的影响，从而对压力传感器的输出性能产生影响。在8个月的时间内进行的压力循环的重复次数的影响也有报道。经过1000次压力循环后，最大非线性和迟滞从0.92%FSO改善到0.06%FSO。研究了压力传感器的输出特性随温度的变化规律。
The behavior of a pressure transducer with Au-Ni (89:11) film as strain gauges have been studied. The effects of post-deposition heat treatment on the resistance of the thin-film strain gauges and hence the output performance of the pressure transducer are discussed. The effect of a repeated number of pressure cycles carried out over a period of eight months has also been reported. The maximum nonlinearity and the hysteresis is improved from 0.92% FSO to 0.06% FSO after 1000 pressure cycles. The output behavior of the pressure transducer with temperature has also been studied.