Development and Testing of a Large-Stroke Nanopositioning Stage With Linear Active Disturbance Rejection Controller
Development and Testing of a Large-Stroke Nanopositioning Stage With Linear Active Disturbance Rejection Controller
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DOI：
10.1109/tase.2021.3085481
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发表时间：
2021-06-11
影响因子：
5.6
通讯作者：
Li, Yangmin
中科院分区：
文献类型：
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作者：
Tang, Hui;Li, Jiedong;Li, Yangmin
基于压电（PZT）驱动器的柔性扫描平台具有大行程、纳米级精度和高带宽等特点，是发展先进的多光子聚合三维纳米光刻系统的理想平台。本文的动机是开发一种纳米定位系统，该系统可以同时实现大行程，高带宽和纳米级精度，以确保其加工尺寸，效率和精度，而无需传统的分步拼接操作。首先，设计了一个具有毫米级工作空间和纳米级定位精度的XY纳米定位工作台。此外，纳米定位工作台的固有频率建模，采取基于矩阵法的柔度分析，这是通过有限元分析（FEA）进行验证。此外，线性自抗扰控制器（LADRC）被证明，它可以等效为一个PID控制器过滤使用二阶低通滤波器，从理论上验证了控制的有效性纳米定位工作台。为了实现LADRC在纳米定位平台上的成功实现，提出了一种新的LADRC定量单参数整定方法。最后，通过一系列的轨迹跟踪实验，验证了所提出的纳米定位平台的有效性和优越性。实验结果表明，该大行程柔性纳米定位系统具有毫米级行程的能力，行程达到1.035 mm × 1.035 mm，平均跟踪误差保持在100 nm以内，闭环带宽达到32 Hz。
Flexure-based scanning stages driven by piezoelectric (PZT) actuator with large stroke, nanoscale precision, and high bandwidth are quite appealing for developing an advanced multiphoton polymerization 3-D nanolithography system. The motivation of this article is to develop a nanopositioning system, which can simultaneously achieve large stroke, high bandwidth, and nanoscale precision to ensure its machining size, efficiency, and accuracy without traditional step-by-step splicing operations. First, an XY nanopositioning stage with millimeter-scale workspace and nanoscale positioning accuracy is designed. Besides, the natural frequency modeling of the nanopositioning stage is conducted by resorting to compliance analysis based on the matrix method, which is validated by a finite-element analysis (FEA). Moreover, linear active disturbance rejection controller (LADRC) is demonstrated that it can be equivalent to a PID controller filtered using a second-order low-pass filter, which theoretically verifies the effectiveness of controlling the nanopositioning stage. In order to complete LADRC's successful implementation for nanopositioning stage, a novel quantitative one-parameter-tuning method of LADRC is proposed. Finally, a series of trajectory tracking experiments has been carried out to verify the effectiveness and superiority of the proposed nanopositioning stage. The experimental results verify that the large-stroke compliant nanopositioning system has the capability to achieve millimeter stroke, which has reached 1.035 mm x 1.035 mm, while the average tracking error is kept within degrees 100 nm, and the closed-loop bandwidth is achieved up to 32 Hz.