Development of Interferometric Excitation Device for Micro Optical Diffusion Sensor Using Laser-Induced Dielectrophoresis
Development of Interferometric Excitation Device for Micro Optical Diffusion Sensor Using Laser-Induced Dielectrophoresis
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DOI：
10.1109/jmems.2011.2176922
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发表时间：
2012-04
影响因子：
2.7
通讯作者：
T. Oka;K. Itani;Y. Taguchi;Y. Nagasaka
中科院分区：
文献类型：
--
作者：
T. Oka;K. Itani;Y. Taguchi;Y. Nagasaka
我们开发了一种新型微型光学扩散传感器（MODS），可以在不使用添加剂的情况下，以小样本量进行高速现场传感。扩散系数可以通过观察激光诱导介电电泳产生的浓度分布的质量扩散过程来测量。在本文中，我们提出了一种使用微菲涅尔镜（MFM）的新型激发系统，该系统由两个成角度的微镜组成，可以提供适合形成正弦浓度分布的干涉激发。本文成功制作了MFM，镜面角度与有限元计算的设计值吻合良好。所制作的MFM引起的干涉条纹对比度很鲜明，可见度为0.97。此外，成功地观察到由MFM引起的扩散现象作为衍射光强度的衰减。结果证实了MFM作为MODS干涉激励装置的有效性。
A novel micro optical diffusion sensor (MODS) has been developed that enables high-speed, on-site sensing with a small sample volume and without the use of additives. The diffusion coefficient can be measured by observing the mass diffusion process of the concentration distribution generated by laser-induced dielectrophoresis. In this paper, we propose a novel excitation system using a micro Fresnel mirror (MFM) that consists of two angled micromirrors and can provide interferometric excitation suitable for forming a sinusoidal concentration distribution. In this paper, MFM was successfully fabricated, and mirror angles were in good agreement with the design values calculated by the finite-element method. The contrast of the interference fringe induced by the fabricated MFM was sharp, and its visibility was 0.97. In addition, the diffusion phenomenon induced by MFM was successfully observed as the decay of the diffracted light intensity. As a result, the validity of MFM as an interferometric excitation device for MODS was confirmed.