A VERSATILE, SOFTWARE CONFIGURABLE MULTICHANNEL STEM DETECTOR FOR ANGLE-RESOLVED IMAGING
A VERSATILE, SOFTWARE CONFIGURABLE MULTICHANNEL STEM DETECTOR FOR ANGLE-RESOLVED IMAGING
复制标题
DOI：
10.1016/0304-3991(94)90091-4
复制
发表时间：
1994-05-01
期刊：
影响因子：
2.2
通讯作者：
BOULIN, C
中科院分区：
文献类型：
--
作者：
HAIDER, M;EPSTEIN, A;BOULIN, C
一种新型 STEM 探测器已经开发出来并进行了测试。该探测器由 30 个分成象限（= 120 个通道）的环组成，它可以进一步利用 STEM 的图像形成原理：可以根据散射电子的散射角度单独记录散射电子，并可以并行获取八个图像。由于其电子计数功能，该检测器非常适合 STEM 的分析和定量应用（例如绝对质量测定和 Z 对比度）。探测器的各个通道可以通过软件组合，以获得具有所需探测器接收角度的图像。每个像素的最短时间（t/像素大于或等于 4 μs）大约与传统单通道探测器的情况一样短。
A new type of STEM detector has been developed and tested. This detector consists of 30 rings which are split in quadrants (= 120 channels) and it allows further advantage to be taken of the image formation principle of STEM: the scattered electrons can be recorded separately according to their scattering angles and eight images can be acquired in parallel. Because of its electron counting capability, this detector is very well suited to analytical and quantitative applications of STEM (e.g. absolute mass determination and Z-contrast). The various channels of the detector can be combined by software in order to obtain images with the desired detector acceptance angles. The minimal time per pixel (t/pixel greater than or equal to 4 mu s) is approximately as short as in the case of conventional single-channel detectors.