(invited) MOS Interface Defect Control in Ge/IIIV Gate Stacks
(invited) MOS Interface Defect Control in Ge/IIIV Gate Stacks
复制标题
(特邀)Ge/IIIV栅极堆栈中的MOS接口缺陷控制
DOI:
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复制
发表时间:
2017
期刊:
影响因子:
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通讯作者:
and M. Takenaka
中科院分区:
文献类型:
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作者:
S. Takagi;M. Ke;C.-Y. Chang;C. Yokoyama;M. Yokoyama;T. Gotow;K. Nishi;and M. Takenaka