Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry
Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry
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DOI：
10.1117/1.oe.55.1.014103
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发表时间：
2016-01-01
影响因子：
1.3
通讯作者：
Osterberg, Kenneth
中科院分区：
文献类型：
--
作者：
Montonen, Risto;Kassamakov, Ivan;Osterberg, Kenneth
在未来的紧凑型直线对撞机（CLIC）中，加速盘的内部形状和对准对对撞机的高效运行至关重要。我们使用校准的定制傅里叶域短相干干涉仪测量了40和60 μ m的超精密转弯台阶的高度（表面粗糙度R-a）
The internal shape and alignment of accelerator discs is crucial for efficient collider operation at the future compact linear collider (CLIC). We applied a calibrated custom-made Fourier-domain short coherence interferometer to measure the height of 40 and 60 mu m ultraprecisely turned steps (surface roughness R-a