Improvement of Uniformity of Inductively Coupled Plasma with a Cone Spiral Antenna
Improvement of Uniformity of Inductively Coupled Plasma with a Cone Spiral Antenna
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DOI：
10.1088/0256-307x/25/6/060
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发表时间：
2008-06
影响因子：
3.5
通讯作者：
Li Lin-sen;Xu Xu-Xu;Liu Feng;Zhou Qian-Hong;Nie Zong-Fu;Liang Yi-zi;Liang Rong-qing
中科院分区：
文献类型：
--
作者：
Li Lin-sen;Xu Xu-Xu;Liu Feng;Zhou Qian-Hong;Nie Zong-Fu;Liang Yi-zi;Liang Rong-qing
在实验中，采用锥形螺旋天线改善了感应耦合等离子体(ICP)的均匀性。对采用新型天线的电感耦合等离子体的性能进行了实验研究。结果表明，与平面螺旋天线相比，等离子体在径向的密度均匀性有了明显的改善。结合实验结果对电感耦合等离子体的性能进行了分析。
Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results.