A fully integrated microbattery for an implantable microelectromechanical system
A fully integrated microbattery for an implantable microelectromechanical system
复制标题
用于植入式微机电系统的完全集成微电池
DOI：
10.1016/j.jpowsour.2008.08.061
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发表时间：
2008
影响因子：
9.2
通讯作者：
A. Sastry
中科院分区：
文献类型：
--
作者：
F. Albano;Yu;D. Blaauw;D. Sylvester;K. Wise;A. Sastry
无线集成微系统工程研究中心的眼内传感器（WIMS-ERC IOS）作为集成自主植入式装置的模型系统进行了研究。在本研究中，我们有四个目标：(1)为WIMS-IOS选择和设计优化的电源；(2)开发一种制造技术，允许CMOS系统的小规模，低成本和可集成制造，并实验证明了微观电源；(3)绘制了几种制备微电池的容量和寿命图；(4)确定小型化对容量、寿命和设备架构的影响。采用物理气相沉积（PVD）技术将金属薄层（≤1μm）依次沉积到玻璃基板（器件中使用的SiO2）上。为了绘制尺寸对电池容量和循环寿命的影响，我们使用Solartron®1470E电池测试仪和Maccor®4000系列测试仪制造和测试了五个独立电池。同时研究了系统集成、变放电速率和减小尺寸对电池性能的影响。在250μA （1.4C）放电条件下，IOS-C-1电池的最大容量为100μAh （cm2）。在O（mm2）电池中，IOS-M-1在2.5μA放电（0.7C）时达到最高容量（2.75μAh，约为理论容量的76%）。
The Wireless Integrated Microsystems Engineering Research Center’s Intraocular Sensor (WIMS-ERC IOS) was studied as a model system for an integrated, autonomous implantable device. In the present study, we had four objectives: (1) select and designing an optimized power supply for the WIMS-IOS; (2) develop a fabrication technique allowing small scale, low-cost, and integrable fabrication for CMOS systems, and experimentally demonstrate a microscopic power source; (3) map capacity and lifetime of several fabricated microbatteries; (4) determine the effects of miniaturization on capacity, lifetime and device architecture. Physical vapor deposition (PVD) was used to deposit thin layers (≤1μm) of metal sequentially onto glass substrates (SiO2, as used in the device). To map the influence of size over cell capacity and cycle life, we fabricated and tested five stand-alone cells using a Solartron®1470E battery tester and a Maccor®4000 series tester. A sixth battery was fabricated to investigate the effects of system integration, variable discharge rate and size reduction simultaneously. The highest experimental capacity among the larger cells O(cm2) was 100μAh, achieved by IOS-C-1 at 250μA (1.4C) discharge. Among O(mm2) cells, IOS-M-1 achieved the highest capacity (2.75μAh, ∼76% of theoretical) at 2.5μA discharge (0.7C rate).