Study on broadband optical constants of yttrium fluoride thin films deposited by electron beam evaporation
Study on broadband optical constants of yttrium fluoride thin films deposited by electron beam evaporation
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电子束蒸发氟化钇薄膜的宽带光学常数研究
DOI：
10.1016/j.ijleo.2019.163548
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发表时间：
2020
期刊：
影响因子：
3.1
通讯作者：
Yiqin Ji
中科院分区：
文献类型：
--
作者：
Huasong Liu;Shida Li;Dan Chen;Xiao Yang;Jiahuan He;Yugang Jiang;Lishuan Wang;D;an Liu;Yiqin Ji
本文研究了电子束蒸发制备的yf3薄膜的宽带光学常数（0.2 μm - 14 μm），与其他文献报道的数据一致。本文采用Cody-Lorentz模型和高斯振子模型建立了yf3薄膜光学常数的复合色散物理模型，该模型适用于含水缺陷的yf3薄膜。yf3薄膜的吸水率分别为3251.9 cm-1和3454.3 cm-1，分别代表h单键和h单键的对称伸缩振动和不对称伸缩振动频率，1640.8 cm-1代表h单键和h单键的剪切振动频率。此外，非晶yf3薄膜的拉曼光谱表明，yf3薄膜的本征振动频率为383 cm−1和462 cm−1。基于上述电子带间跃迁和微结构振动特性，得到了yf3薄膜的宽带光学常数，弥补了yf3薄膜消光系数数据的不足。
In this paper, the broadband optical constants of YF3thin films prepared by electron beam evaporation were studied (0.2 μm–14 μm), which are consistent with the data reported in other literature. The composite dispersion physical model of the optical constants of YF3thin films was established by using Cody-Lorentz model and Gaussian oscillator model, which is employed in this study and is universal for YF3thin films with water defects. The water absorption of the YF3thin films occurs at 3251.9 cm−1and 3454.3 cm-1representing the symmetrical stretching vibration and asymmetric stretching vibration frequency of the Hsingle bondOsingle bondH bond, and 1640.8 cm−1representing the shear vibration frequency of the Hsingle bondOsingle bondH bond. In addition, the Raman spectra of amorphous YF3thin film shows that the intrinsic vibrational frequencies are 383 cm−1and 462 cm−1. Based on the electron interband transition and the micro-structural vibration characteristics mentioned above, the broadband optical constants of the YF3thin film are obtained, which makes up the deficiency of extinction coefficient data of YF3thin film.