Boundary-directed epitaxy of block copolymers
Boundary-directed epitaxy of block copolymers
复制标题
嵌段共聚物的边界定向外延
DOI：
10.1038/s41467-020-17938-3
复制
发表时间：
2020-08-19
影响因子：
16.6
通讯作者：
Arnold, Michael S.
中科院分区：
文献类型：
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作者：
Jacobberger, Robert M.;Thapar, Vikram;Arnold, Michael S.
嵌段共聚物（bcp）的定向自组装实现了低于10纳米尺寸的纳米制造，超出了传统光刻技术的分辨率。然而，指导BCP域的位置、方向和远程横向顺序以产生技术上有用的模式是一个挑战。在这里，我们提出了一种有前途的方法，利用不同组成的表面上的平面低分辨率区域之间的空间边界进行直接组装。在背景衬底上的孤立条纹的边缘形成对边界。垂直片层在每个条纹/衬底边界处形成核，并通过化学对比固定在每个条纹/衬底边界处，平行于边界，有选择地从边界传播到条纹内部（而水平片层在背景上形成），并注册为宽条纹以增加特征密度。在> ~ 80nm宽的条纹上展示了半间距为6.4 nm的有序BCP线阵列。边界定向外延为在10纳米以下的尺度上组装、创建和光刻定义材料提供了一条有吸引力的途径。
Directed self-assembly of block copolymers (BCPs) enables nanofabrication at sub-10 nm dimensions, beyond the resolution of conventional lithography. However, directing the position, orientation, and long-range lateral order of BCP domains to produce technologically-useful patterns is a challenge. Here, we present a promising approach to direct assembly using spatial boundaries between planar, low-resolution regions on a surface with different composition. Pairs of boundaries are formed at the edges of isolated stripes on a background substrate. Vertical lamellae nucleate at and are pinned by chemical contrast at each stripe/substrate boundary, align parallel to boundaries, selectively propagate from boundaries into stripe interiors (whereas horizontal lamellae form on the background), and register to wide stripes to multiply the feature density. Ordered BCP line arrays with half-pitch of 6.4 nm are demonstrated on stripes >80 nm wide. Boundary-directed epitaxy provides an attractive path towards assembling, creating, and lithographically defining materials on sub-10 nm scales.