Simultaneous removal of nonrotationally symmetric errors in tilted wave interferometry
Simultaneous removal of nonrotationally symmetric errors in tilted wave interferometry
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DOI：
10.1117/1.oe.58.7.074105
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发表时间：
2019-07
影响因子：
1.3
通讯作者：
J. Schindler;C. Pruss;W. Osten
中科院分区：
文献类型：
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作者：
J. Schindler;C. Pruss;W. Osten
抽象的。倾斜波干涉仪是一种快速、准确的非球面和自由曲面测量仪器。我们提出了一种增强其健壮性和灵活性的方法。倾斜波干涉测量关键依赖于准确的校准，而对校准设置的任何改变通常都需要重新校准。因此，我们提出了一种同时重建地形并消除这种变化引起的误差的方法。针对含有大量黑盒模型参数的复杂非零系统，提出了一种辨识系统误差趋势的方法。该程序允许根据不同旋转位置的测量结果推导出非旋转对称分量的误差消除方案。仿真方法和专用实验证明了该误差消除方法的可行性和有效性。实现了即使在错误校准状态下的系统误差的显著减少。因此，避免了重新校准，提高了测量时间和灵活性。
Abstract. The tilted wave interferometer has been developed as a fast and accurate instrument for the measurement of aspheric and freeform surfaces. We present a method for increasing its robustness and flexibility. Tilted wave interferometry crucially depends on accurate calibration and any changes to a calibrated setup require, in general, a recalibration. Therefore, we propose a method for simultaneous topography reconstruction and elimination of errors arising from such changes. An approach to identify trends in systematic errors for the complex non-null setup with a large number of blackbox model parameters is worked out. The procedure allows deriving an error removal scheme for nonrotationally symmetric components based on measurements in different rotational positions. The feasibility and benefit of the error elimination method are shown both by simulation methods and dedicated experiments. A significant reduction of systematic errors even in a miscalibrated state is achieved. Hence, recalibrations are avoided and measurement time and flexibility are improved.