Photolithographic nanoseeding method for selective synthesis of metal-catalysed nanostructures
Photolithographic nanoseeding method for selective synthesis of metal-catalysed nanostructures
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DOI：
10.1088/1361-6528/aae795
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发表时间：
2019-01-04
期刊：
影响因子：
3.5
通讯作者：
Desmulliez, M. P. Y.
中科院分区：
文献类型：
--
作者：
Marques-Hueso, J.;Morton, A. S.;Desmulliez, M. P. Y.
在这项工作中，我们提出了一个一般的方法，选择性合成的光刻局部纳米结构的平面几何形状。该方法依赖于光图案化金属纳米颗粒（NP）/聚合物纳米复合材料，它可以提供一系列的NP尺寸，多分散性和密度的先前的概念。首先，通过光刻法将含有金属离子的光致抗蚀剂图案化。银纳米颗粒是在图案化薄膜曝光和显影后通过嵌入其结构中的离子的热诱导还原原位合成的。温和的等离子体灰化用于选择性地去除聚合物，这在图案化区域上留下NP。这些NP用作后续过程的种子。为了证明该方法的灵活性，这里显示了它通过不同工艺选择性地产生局部纳米结构的用途。采用自上而下的方法，通过反应离子刻蚀和纳米颗粒的掩模制备了高纵横比的硅纳米草。在一个自下而上的方法，280纳米的铜簇有选择地生长在阵列中。这种方法可以很容易地外推到其他金属，它提供了一种快速的方法来选择性地产生分层纳米结构在大平面区域，可用于不同的应用，如纳米结构传感器阵列的制造。
In this work we present a general method for the selective synthesis by photolithography of localised nanostructures in planar geometries. The methodology relies on the previous concept of photo-patternable metallic nanoparticle (NP)/polymer nanocomposites, which can provide a range of NP sizes, polydispersity and densities. First, a photoresist containing metallic ions is patterned by photolithography. Silver NPs are synthesised in situ after the exposure and development of the patterned thin film via the thermal-induced reduction of ions embedded in its structure. Gentle plasma ashing is used to selectively remove the polymer, which leaves NPs on the patterned areas. These NPs are used as seeds for subsequent processes. In order to demonstrate the flexibility of the method, its use to selectively produce localised nanostructures through different processes is shown here. Following a top-down approach, high aspect-ratio silicon nanograss has been produced by reactive ion etching and masking by the NPs. In a bottom-up approach, 280 nm copper clusters have been selectively grown in arrays. This method can be easily extrapolated to other metals and it provides a quick way to selectively generate hierarchical nanostructures in large planar areas that can be used for different applications, such as the fabrication of nanostructured sensor arrays.