Novel imaging technique for non-destructive metrology and characterization of ultraviolet-sensitive polymeric microstructures

Novel imaging technique for non-destructive metrology and characterization of ultraviolet-sensitive polymeric microstructures
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用于紫外敏感聚合物微结构无损计量和表征的新型成像技术

DOI:
10.1063/1.5126957
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发表时间:
2020
影响因子:
1.6
通讯作者:
Saggere, Laxman
Saggere, Laxman
中科院分区:
工程技术4区
文献类型:
--
作者:
Rountree, Corey M.;Ramkumar, Pradeep Kumar;Saggere, Laxman

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