Novel imaging technique for non-destructive metrology and characterization of ultraviolet-sensitive polymeric microstructures
Novel imaging technique for non-destructive metrology and characterization of ultraviolet-sensitive polymeric microstructures
复制标题
用于紫外敏感聚合物微结构无损计量和表征的新型成像技术
DOI:
10.1063/1.5126957
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发表时间:
2020
影响因子:
1.6
通讯作者:
Saggere, Laxman
中科院分区:
文献类型:
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作者:
Rountree, Corey M.;Ramkumar, Pradeep Kumar;Saggere, Laxman