Microclamping principles from the perspective of micrometrology – A review
Microclamping principles from the perspective of micrometrology – A review
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DOI：
10.1016/j.precisioneng.2017.07.008
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发表时间：
2017-10
影响因子：
3.6
通讯作者：
S. Jantzen;M. Stein;K. Kniel;A. Dietzel
中科院分区：
文献类型：
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作者：
S. Jantzen;M. Stein;K. Kniel;A. Dietzel
本文从微小物体尺寸测量中样品夹具的角度，综述了夹紧原理领域。因此，在根据这些要求对文献中发现的微型夹具的原理和解决方案进行审查和评估之前，解释了允许尺寸测量的夹紧微型部件的要求。结果表明，没有单一的优越夹紧原理或实现方法，而是针对特定应用的几种有效解决方案。本文的核心价值是尺寸微测量中对样品夹具的要求与微夹紧领域中已经研究的许多方法之间的联系。雷达图和决策树总结并可视化了本次审查的主要方面。最后，提出了今后重点研究方向。
This paper gives an overview of the field of clamping and gripping principles from the viewpoint of sample fixturing for dimensional metrology for microobjects. The requirements for clamping microcomponents that allow dimensional measurements are therefore explained before principles and solutions of microclamps as found in literature are reviewed and evaluated on basis of these requirements. Results show that there is no single superior clamping principle or method of implementation but rather several effective solutions for specific applications. The core value of this paper is thelink between requirements for sample fixturing in dimensional micrometrology and the many approaches already investigated in the field of microclamping. A radar chart and a decision tree summarize and visualize the major aspects of this review. Finally, directions of future key research areas are suggested.