Ultra Uniform Pb(0.865)La(0.09)(Zr(0.65)Ti(0.35))O₃ Thin Films with Tunable Optical Properties Fabricated via Pulsed Laser Deposition.
Ultra Uniform Pb(0.865)La(0.09)(Zr(0.65)Ti(0.35))O₃ Thin Films with Tunable Optical Properties Fabricated via Pulsed Laser Deposition.
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通过脉冲激光沉积制备具有可调光学性能的超均匀 Pb0.865La0.09(Zr0.65Ti0.35)O-3 薄膜
DOI：
10.3390/ma11040525
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发表时间：
2018-03-29
期刊：
影响因子：
--
通讯作者：
Zhang G
中科院分区：
文献类型：
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作者：
Jiang S;Huang C;Gu H;Liu S;Zhu S;Li MY;Yao L;Wu Y;Zhang G
铁电薄膜在电子和光学领域有着广泛的应用，其形貌和性质可以通过生长过程中的定性控制来调节。在这项工作中，我们展示了具有高均匀性和优化的光学性能，通过控制沉积温度和氧气压力的MgO（200）上的Pb 0.865 La 0.09（Zr 0.65 Ti 0.35）O3（PLZT）薄膜的演变。由于结晶度的提高，钙钛矿相只能在高于700 °C的沉积温度和高于50 Pa的氧气压力下获得。同时，随着温度的升高，PLZT薄膜的表面形貌逐渐变得光滑、致密，成核点自发增加，薄膜的晶化对氧空位的变化也有敏感的响应。相应地，折射率随着沉积温度和氧压的变化而逐渐发展，由于各种轻微的损耗，每个样品的消光系数都接近于零，这是由于相对光滑的形貌。所制备的PLZT薄膜具有铁电性，介电常数随电场变化敏感，在电子和光学领域具有潜在的应用价值。
Ferroelectric thin films have been utilized in a wide range of electronic and optical applications, in which their morphologies and properties can be inherently tuned by a qualitative control during growth. In this work, we demonstrate the evolution of the Pb0.865La0.09(Zr0.65Ti0.35)O3 (PLZT) thin films on MgO (200) with high uniformity and optimized optical property via the controls of the deposition temperatures and oxygen pressures. The perovskite phase can only be obtained at the deposition temperature above 700 °C and oxygen pressure over 50 Pa due to the improved crystallinity. Meanwhile, the surface morphologies gradually become smooth and compact owing to spontaneously increased nucleation sites with the elevated temperatures, and the crystallization of PLZT thin films also sensitively respond to the oxygen vacancies with the variation of oxygen pressures. Correspondingly, the refractive indices gradually develop with variations of the deposition temperatures and oxygen pressures resulted from the various slight loss, and the extinction coefficient for each sample is similarly near to zero due to the relatively smooth morphology. The resulting PLZT thin films exhibit the ferroelectricity, and the dielectric constant sensitively varies as a function of electric filed, which can be potentially applied in the electronic and optical applications.