A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide
A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide
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DOI：
10.1016/s0925-4005(03)00186-2
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发表时间：
2003-08
影响因子：
8.4
通讯作者：
Jianqiao Hu;F. Zhu;Jian Zhang;H. Gong
中科院分区：
文献类型：
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作者：
Jianqiao Hu;F. Zhu;Jian Zhang;H. Gong
利用氧化铟锡（ITO）和石英晶体微天平的组合制作了一氧化氮（NO）气体传感器。该传感器是由抛光AT切石英晶体上的ITO薄膜沉积使用射频磁控溅射。该传感器在室温下对NO气体敏感，避免了与高温传感器相关的问题。结果表明，当NO浓度为60ppm时，传感器在600s内出现110Hz的负频移，频率变化率随NO浓度的增加而增大。用X射线光电子能谱（XPS）研究了ITO表面吸附NO前后元素的化学状态。可能的气敏机理进行了讨论。
Nitric oxide (NO) gas sensor using a combination of indium tin oxide (ITO) and quartz crystal microbalance is fabricated. The sensor is made from the polished AT-cut quartz crystal on which the ITO thin film is deposited using radio frequency magnetron sputtering. The sensor is sensitive to NO gas at room temperature and avoids the problems related to elevated-temperature sensors. It is shown that the sensor has a distinct negative frequency shift of 110Hz within 600s when it is exposed to 60ppm of NO. The frequency-changing rate is also found to increase with NO concentration. The chemical status of elements on the ITO surface before and after NO adsorption is investigated by X-ray photoelectron spectroscopy (XPS). Possible gas sensing mechanisms are discussed.