Fabrication and modal characterisation of large-area polymer membranes for acoustic micro-electromechanical systems devices
Fabrication and modal characterisation of large-area polymer membranes for acoustic micro-electromechanical systems devices
复制标题
用于声学微机电系统器件的大面积聚合物膜的制造和模态表征
DOI：
10.1049/mnl.2018.0089
复制
发表时间：
2018
影响因子：
1.3
通讯作者：
Camellini L
中科院分区：
文献类型：
--
作者：
Camellini L
采用湿法转移技术制备了由聚甲基丙烯酸甲酯（PMMA）和铝（Al）组成的双层聚合物/金属悬浮膜，其中采用聚二烯丙基二甲基氯化铵（PDAC）作为牺牲层，以促进PMMA/Al薄层从衬底支架上的分离。通过这种方式，获得了直径（3.5 mm）与厚度（400 nm）之比为104的独立PMMA/Al膜。膜已被致动的机械和电热和他们的模态行为，其特征在于使用激光多普勒测振仪。在2-25 kHz的范围内检测到前五种振动模式。第二和第五简并模式已经被看到分裂，可能是由于不均匀的张力或质量密度。膜可以实现几十微米量级的振动幅度。当执行电热致动时，已经观察到可以通过控制跨膜的电流的路径来调谐单个模式的幅度。
Bilayer polymer/metal suspended membranes made of poly(methyl methacrylate) (PMMA) and aluminium (Al) have been fabricated using a wet transfer technique where a polyelectrolyte (polydiallyldimethylammonium chloride – PDAC) has been employed as sacrificial layer to facilitate the detachment of the thin PMMA/Al layers from the substrate holders. In this way, free‐standing PMMA/Al membranes with outstanding diameter (3.5 mm) to thickness (400 nm) ratios of ∼104have been obtained. The membranes have been actuated mechanically and electrothermally and their modal behaviour characterised using laser Doppler vibrometry. The first five modes of vibrations have been detected in the range of 2–25 kHz. The second and fifth degenerate modes have been seen to split, probably due to non‐uniform tension or mass density. The membranes can achieve vibration amplitudes in the order of few tens of microns. When performing electro‐thermal actuation, it has been observed that the amplitude of a single mode can be tuned by controlling the path of the electric current across the membrane.