Angular anisotropy of electron energy distributions in inductively coupled plasmas
Angular anisotropy of electron energy distributions in inductively coupled plasmas
复制标题
电感耦合等离子体中电子能量分布的角各向异性
DOI：
10.1063/1.1614428
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发表时间：
2003
影响因子：
3.2
通讯作者：
M. Kushner
中科院分区：
文献类型：
--
作者：
A. Vasenkov;M. Kushner
典型的低压（<10 mtorr）和低频（<10 MHz）电感耦合平原（ICP）的非碰撞电子转运具有产生高度各向异性角度依赖性的电子能量（AEED）的潜力使用嵌入在二维等离子体设备模型中的蒙特卡洛模拟（MCS）研究了轴向对称ICP的AEED。在MCS中伪电子的轨迹的发展过程中，分布的角度依赖性的核心依赖的核心。将这种行为归因于线性和非线性的叠加。当皮肤层异常并且非线性洛伦兹力是...
The noncollisional electron transport that is typical of low-pressure (<10 mTorr) and low-frequency (<10 MHz) inductively coupled plasmas (ICPs) has the potential to produce highly anisotropic angle-dependent electron energy distributions (AEEDs). The properties of AEEDs in axially symmetric ICPs were investigated using a Monte Carlo simulation (MCS) embedded in a two-dimensional plasma equipment model. A method was developed to directly compute the coefficients for a Legendre polynomial expansion of the angular dependence of the distributions during advancement of the trajectories of pseudoelectrons in the MCS. We found significant anisotropy in the AEEDs for transport in the azimuthal–radial plane for a wide range of pressures and frequencies, and attributed this behavior to the superposition of both linear and nonlinear forces. The angular anisotropy of AEEDs in the radial–axial plane in the bulk plasma was found to be significant only when the skin layer was anomalous and nonlinear Lorentz forces are ...