Investigation on modified jet electrochemical machining of micro-channel
Investigation on modified jet electrochemical machining of micro-channel
复制标题
微通道改进喷射电化学加工研究
DOI：
10.1007/s00170-019-04312-x
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发表时间：
2019-08
影响因子：
3.4
通讯作者：
Guo Z. N.
中科院分区：
文献类型：
--
作者：
Chen X. L.;Dong B. Y.;Fan G. C.;Zhang C. Y.;Liu J. W.;Zhang Y. J.;Guo Z. N.
微通道已广泛应用于双极板、微化学反应器、微热管等多种器件中。电化学加工（ECM）是在金属表面制造此类结构的一种有前途的方法。本文提出了一种改进的喷射 ECM 来生成微通道。带有微通孔的柔性绝缘面罩覆盖在金属喷嘴的头部表面上。加工时，改造喷嘴上的掩模与工件接触，喷嘴内喷射的电解液被掩模上的微通孔划分为不同的加工区域；然后，通过在喷嘴和工件之间施加有效电压移动工件来产生微通道。与传统的喷射ECM相比，该方法的加工区域可以被微通孔限制，可以有效地生成微尺度的通道。此外，可以通过使用具有单排微通孔的掩模来产生多个微通道，而不是组装多个喷嘴。实验结果表明，脉冲占空比对微通道尺寸影响较大，而脉冲频率则影响较小。此外，还研究了不同加工参数下的材料去除率（MRR）、有效材料去除率（MRRe）和电流效率（CE）。结果表明，虽然MRR随着脉冲占空比的增加而增加，但MRRe和CE却降低了，导致理论与实验存在偏差。工件的移动速度对CE也有显着影响。增加移动速度有助于提高 CE，随着移动速度从 20 μm/s 增加到 80 μm/s，CE 从 0.48 增加到 0.66。最后，利用该方法很好地制备了多重微通道、微反应器、交叉微通道等多种微通道，展示了灵活高效的工艺过程。
Micro-channels have been widely used in variety of devices including bipolar plate, micro-chemical reactor, and micro-heat pipe. Electrochemical machining (ECM) is a promising approach to manufacture such structure on metallic surface. This paper proposed a modified jet-ECM for generating micro-channels. A flexible insulated mask with micro-through-holes was covered on the head surface of a metallic nozzle. During machining, the mask on the modified nozzle was contacted with the workpiece, and the jetting electrolyte in the nozzle was divided into different machining regions by the micro-through-holes in the mask; then, the micro-channels could be generated by moving the workpiece with an effective voltage applied between the nozzle and workpiece. Compared with traditional jet-ECM, the machining region in this method could be confined by the micro-through-hole, which was efficient for generating channel in micro-scale. In addition, multiple micro-channels could be generated by using a mask with a single row of micro-through-holes rather than assembling multiple nozzles. The experimental results showed that the pulse duty cycle has a significant influence on the dimension of micro-channel, while the pulse frequency has slight influence in contrast. In addition, the material removal rate (MRR), effective material removal rate (MRRe), and current efficiency (CE) were investigated with different machining parameters. The results indicated that although MRR was increased with the increasing pulse duty cycle, both MRReand CE were reduced, leading to a deviation between the theory and experiment. The moving speed of workpiece also has a significant influence on CE. Increasing moving speed was useful for enhancing the CE, from 0.48 to 0.66 with the moving speed increasing from 20 to 80 μm/s. Finally, several kinds of micro-channels such as multiple micro-channels, micro-reactor, and cross micro-channels were well manufactured with this method, demonstrating a flexible and efficient process.
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