High-Q optical resonators in silicon-on-insulator-based slot waveguides
High-Q optical resonators in silicon-on-insulator-based slot waveguides
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DOI：
10.1063/1.1871360
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发表时间：
2005-02-21
影响因子：
4
通讯作者：
Scherer, A
中科院分区：
文献类型：
--
作者：
Baehr-Jones, T;Hochberg, M;Scherer, A
这封信描述了基于薄绝缘体上硅材料的槽波导几何形状的高q椭圆谐振器的设计，制造和特性。在这种滤波器中测量了高达27000的光学质量因子，根据我们的谐振器测量结果，我们估计狭缝波导中的损耗为-10 dB/cm。这种波导可以将光集中到纳米尺度的非常高的光场，并且在低折射率材料中具有潜在的光调制、非线性光学和光传感应用前景。(c) 2005年美国物理研究所。
This letter describes the design, fabrication and characterization of high-Q oval resonators based on slot waveguide geometries in thin silicon-on-insulator material. Optical quality factors of up to 27 000 were measured in such filters, and we estimate losses of -10 dB/cm in the slotted waveguides on the basis of our resonator measurements. Such waveguides enable the concentration of light to very high optical fields within nanoscale dimensions, and show promise for the confinement of light in low-index material with potential applications for optical modulation, nonlinear optics and optical sensing. (c) 2005 American Institute of Physics.