Role of oxygen in high temperature hydrogen sulfide detection using MISiC sensors
Role of oxygen in high temperature hydrogen sulfide detection using MISiC sensors
复制标题
使用 MISiC 传感器检测高温硫化氢中氧气的作用
DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
A. Horsfall
中科院分区：
文献类型：
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作者：
M. Weng;R. Mahapatra;N. Wright;A. Horsfall
本文报告了具有催化顶部接触的 MISiC 电容器传感器在超过 300 °C 的温度下对气体混合物（包括硫化氢）的灵敏度。气体浓度可以从通过电容器的泄漏电流的变化中提取，并且暴露于 H2S 给出类似于在氢气中观察到的响应。这表明催化接触上的 H2S 分解形成原子氢，从而在电介质/SiO2 界面处形成偶极层。同时暴露于氧气和 H2S 中会产生更大的类似氢的响应，这与氢气和氧气混合时观察到的相反。我们认为这种响应与用于制造电容器结构的电介质选择的影响有关，从而提供了开发阵列技术以独特识别混合物中气体种类的机会。
This paper reports on the sensitivity of a MISiC capacitor sensor with a catalytic top contact to gas mixtures, including hydrogen sulfide, at temperatures in excess of 300 °C. The gas concentration may be extracted from the change in leakage current through the capacitor and exposure to H2S gives a response similar to that observed in hydrogen. This indicates that the decomposition of the H2S on the catalytic contact is forming atomic hydrogen, which forms a dipole layer at the dielectric/SiO2 interface. Exposure to oxygen and H2S simultaneously gives a larger hydrogen-like response, which is contrary to that observed when hydrogen and oxygen are mixed. We suggest that this response is related to the influence of the choice of dielectric used to fabricate the capacitor structure, offering the opportunity to develop array technology for unique identification of gas species in a mixture.