Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses
Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses
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通过飞秒 nJ 能量脉冲对硼硅酸盐玻璃进行表面纳米结构
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
H. Misawa
中科院分区：
文献类型：
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作者：
E. Vanagas;I. Kudryashov;D. Tuzhilin;S. Juodkazis;S. Matsuo;H. Misawa
我们报告的一个功能，小丘形损伤，形成在玻璃表面上的飞秒脉冲的tp=180 fs [半高宽（FWHM）值]持续时间产生的记录光束焦点与能量为5 nJ/脉冲在800 nm波长（相应的辐照度约为7.6 TW/cm 2的0.68 μm的FWHM光斑尺寸进行了评估）。在单脉冲照射中可重复记录40-50 nm高的单个小丘。在一个大的，弯曲的区域（超过200 μm2）的表面纳米图案化可以实现通过实施共焦表面曲率跟踪方法，利用反射的补充连续激光束。用这种方法得到的烧蚀图形与库仑爆炸的烧蚀图形是一致的。
We report on a feature, that of hillock-shaped damage, formed on a glass surface by femtosecond pulses of tp=180 fs [full width at half maximum (FWHM) value] duration produced by a recording beam focus with energy of 5 nJ/pulse at 800 nm wavelength (the corresponding irradiance of about 7.6 TW/cm2 was evaluated for a 0.68 μm FWHM spot size). Single hillocks of 40–50 nm height were recorded reproducibly in single-pulse irradiation. Surface nanopatterning over a large, curved area (over 200 μm2) can be achieved by implementing a confocal surface curvature tracking method that utilizes the reflection of a supplementary cw-laser beam. The ablation pattern achieved by this method is consistent with that of a Coulomb explosion.