Hydrodynamic radio‐frequency model of an ion sheath near a conductor in a plasma
Hydrodynamic radio‐frequency model of an ion sheath near a conductor in a plasma
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等离子体中导体附近离子鞘层的流体动力学射频模型
DOI：
10.1029/90rs02757
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发表时间：
1991
期刊：
影响因子：
--
通讯作者：
K. Balmain
中科院分区：
文献类型：
--
作者：
G. Morin;K. Balmain
建立了一个等离子体中与导体相邻的离子鞘层区域的热等离子体、流体动力学、射频模型。鞘层具有阶梯状的密度分布，由几个均匀等离子体密度的连续区域组成。根据流体动力学理论制定的一组一致的边界条件被施加在密度阶梯处的场域上，并且在导体 - 等离子体界面使用吸收边界条件。当用于计算球形探针的射频导纳时，这个理论模型的单阶梯版本（1）与使用流体动力学理论和连续密度分布计算出的导纳非常吻合，并且（2）在低频时与使用动力学理论计算出的导纳相符。因此，这种单阶梯或多阶梯鞘层模型在涉及与等离子体接触的导体的广泛射频相互作用的理论分析中应该是有用的。
A warm-plasma, hydrodynamic, radio-frequency model of the ion sheath region adjacent to a conductor in a plasma is developed. The sheath has a stepped density profile consisting of several contiguous regions of uniform plasma density. A consistent set of boundary conditions developed from hydrodynamic theory is imposed on the fields at the density steps, and the absorptive boundary condition is used at the conductor-plasma interface. When applied to calculate the radio-frequency admittance of a spherical probe, the single-step version of this theoretical model (1) agrees closely with the admittance calculated using hydrodynamic theory and a continuous density profile and (2) agrees at low frequencies with the admittance calculated using kinetic theory. As a consequence, the single-step or multistep sheath models of this type should be useful in theoretical analyses of a wide range of radio-frequency interactions involving a conductor in contact with a plasma.