Stroboscopic oblique-incidence interferometer for motion visualization of stator of ultrasonic motor.
Stroboscopic oblique-incidence interferometer for motion visualization of stator of ultrasonic motor.
复制标题
用于超声电机定子运动可视化的频闪斜入射干涉仪。
DOI：
10.1016/j.phpro.2011.06.129
复制
发表时间：
2011
期刊：
影响因子：
--
通讯作者：
Y. Otani
中科院分区：
文献类型：
--
作者：
T. Higuchi;Y. Mizutani;T. Iwata;Y. Otani
本文描述了一种使用频闪斜入射干涉仪的超声波电机（USM）运动可视化技术。 USM的特性取决于定子的振动模式，定子是USM的主要部件之一。虽然有一些对其振动模式的可视化技术，但很难可视化。因为定子的表面对于灯来说是粗糙的。为了可视化这样的表面，我们重点关注斜入射干涉仪。干涉仪非常适合分析粗糙表面，因为通过使用斜入射光可以减少粗糙表面处的散射。此外，为了检测振动表面，使用与定子同步的脉冲光作为光源。我们成功地检测到振动定子的条纹图案的周期性运动。
This paper describes a motion-visualization technique for an ultrasonic motor (USM) by using a stroboscopic oblique-incidence interferometer. Characteristics of USM depend on a vibration mode of a stator which is one of main component of USM. Though there are some visualization techniques of its vibrated mode, it is difficult to visualization. Because the surface of the stator is rough for a light. For visualization such a surface, we focused on an oblique-incidence interferometer. The interferometer is well suited to analyze the rough surface because a scattering at the rough surface is reduced by using an oblique-incidence light. Furthermore, for detecting a vibrated surface, a pulsed light synchronized with stator was used as light source. We have succeeded to detect a periodically movement of fringe patterns of the vibrated stator.