Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications
Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications
复制标题
鉴于气相光谱应用，可大幅调节 MEMS-VCSEL 的光谱和调制特性
DOI：
--
复制
发表时间：
2010
期刊：
影响因子：
--
通讯作者：
Markus
中科院分区：
文献类型：
--
作者：
Stéphane Schilt;K. Zogal;B. Kögel;Peter Meissner;M. Maute;Rui Protasio;Markus
报告了 1.56 μm 光谱范围内可调谐激光器的光谱特性的广泛表征。该器件以非常紧凑的布置将垂直腔表面发射激光器 (VCSEL) 与微机械 (MEMS) 布拉格镜结合在一起。通过 MEMS 反射镜的电热驱动获得的大可调性使得该设备对于高分辨率光谱非常有吸引力。提出了在气体传感中实施波长调制光谱技术的相关激光参数，例如调谐和调制特性。还显示了使用该激光器进行的初步气体光谱实验。
An extensive characterization of the spectral properties of a largely tunable laser in the 1.56-μm spectral range is reported. This device combines a vertical-cavity surface-emitting laser (VCSEL) with a micro-machined (MEMS) Bragg mirror in a very compact arrangement. The large tunability obtained by an electro-thermal actuation of the MEMS mirror makes this device very attractive for high-resolution spectroscopy. Relevant laser parameters for the implementation of wavelength modulation spectroscopy techniques in gas sensing, such as tuning and modulation properties, are presented. A preliminary gas spectroscopy experiment performed with this laser is also shown.