Carbon Nanotube Bundle Array Cold Cathodes for THz Vacuum Tube Sources
Carbon Nanotube Bundle Array Cold Cathodes for THz Vacuum Tube Sources
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DOI：
10.1007/s10762-009-9547-x
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发表时间：
2009-12-01
影响因子：
2.9
通讯作者：
Siegel, Peter H.
中科院分区：
文献类型：
--
作者：
Manohara, Harish M.;Toda, Risaku;Siegel, Peter H.
我们提出了由碳纳米管束阵列组成的高性能冷阴极，在5至8 V/A μ m的应用磁场下，无任何光束聚焦，通常产生> 15 A/cm(2)。它们在10（-6）至10（-4）托的低真空中表现出强大的运行能力，这是在密封微腔内通常可以实现的范围。开发了一种新的双soi工艺，以单片集成栅极和附加的光束裁剪电极。根据特定要求设计电极的能力使得碳纳米管场发射源非常灵活。这些阴极的寿命受到两种效应的影响：阳极溅射引起的发射逐渐衰减，以及在高场（bbb10 V/ a μ m）下碳纳米管束位移引起的灾难性失效。
We present high performance cold cathodes composed of arrays of carbon nanotube bundles that routinely produce > 15 A/cm(2) at applied fields of 5 to 8 V/A mu m without any beam focusing. They have exhibited robust operation in poor vacuums of 10(-6) to 10(-4) Torr- a typically achievable range inside hermetically sealed microcavities. A new double-SOI process was developed to monolithically integrate a gate and additional beam tailoring electrodes. The ability to design the electrodes for specific requirements makes carbon nanotube field emission sources extremely flexible. The lifetime of these cathodes is found to be affected by two effects: a gradual decay of emission due to anode sputtering, and catastrophic failure because of dislodging of CNT bundles at high fields ( > 10 V/A mu m).