Effect of substrate temperature on the structural and optical properties of MoO3 thin films prepared by spray pyrolysis technique
Effect of substrate temperature on the structural and optical properties of MoO3 thin films prepared by spray pyrolysis technique
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DOI：
10.1016/s0921-5107(02)00385-9
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发表时间：
2003-01-15
期刊：
影响因子：
--
通讯作者：
Desfeux, R
中科院分区：
文献类型：
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作者：
Bouzidi, A;Benramdane, N;Desfeux, R
用0.1M氯化钼(MoCl5)溶解于去离子水中，采用喷雾热解技术在玻璃基片上制备了氧化钼薄膜。在200-300℃的温度范围内研究了衬底温度对结构和光学性质的影响。在200℃下制备的薄膜为单斜晶系，在250~300℃范围内制备的薄膜为具有正交对称性的多晶薄膜。样品的透过率和光学带隙随衬底温度的变化而变化。根据衬底温度的不同，能隙在3.14 eV到3.34 eV之间。(C)2002 Elsevier Science B.V.保留所有权利。
Thin films of Molybdenum oxide were prepared by spray pyrolysis technique on glass substrates, by using 0.1 M of molybdenum chloride (MoCl5) dissolved in deionized water. Influence of substrate temperature on structural and optical properties is studied in the range from 200 to 300 degreesC. The prepared samples correspond to MoO3 phase with orientation and crystallites size which are modified by deposition temperature, the films prepared at 200 degreesC are monoclinic and the films prepared in the range from 250 to 300 degreesC are polycrystalline with orthorhombic symmetry. The samples present transmission coefficient and optical gap which vary as function of substrate temperature. Gap energy is located between 3.14 and 3.34 eV depending on the substrate temperature. (C) 2002 Elsevier Science B.V. All rights reserved.