MULTIPLE-WAVELENGTH VERTICAL-CAVITY LASER ARRAYS BASED ON POSTGROWTH LATERAL-VERTICAL OXIDATION OF ALGAAS
MULTIPLE-WAVELENGTH VERTICAL-CAVITY LASER ARRAYS BASED ON POSTGROWTH LATERAL-VERTICAL OXIDATION OF ALGAAS
复制标题
基于藻类生长后横向-垂直氧化的多波长垂直腔激光阵列
DOI：
10.1063/1.121795
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发表时间：
1998
影响因子：
4
通讯作者：
L. Coldren
中科院分区：
文献类型：
--
作者：
A. Fiore;Y. Akulova;J. Ko;E. Hegblom;L. Coldren
我们证明了AlGaAs的横向-垂直组合氧化可以用来改变单外延生长后的光学腔的谐振波长。利用该技术实现了波长跨度为48 nm的垂直腔面发射激光器的多波长阵列。
We demonstrate that combined lateral-vertical oxidation of AlGaAs can be used to change the resonant wavelength of an optical cavity after the single epitaxial growth. A multiple-wavelength array of vertical-cavity surface-emitting lasers with a 48 nm wavelength span has been realized using this technique.