Ion Beam Extraction from Large Bore 11 to 13 GHz ECR Ion Source with a Pair of Cylindrically Comb‐Shaped Magnetic Fields
Ion Beam Extraction from Large Bore 11 to 13 GHz ECR Ion Source with a Pair of Cylindrically Comb‐Shaped Magnetic Fields
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使用一对圆柱形梳状磁场从大口径 11 至 13 GHz ECR 离子源提取离子束
DOI：
10.1063/1.3033680
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
T. Iida
中科院分区：
文献类型：
--
作者：
Takuto Watanabe;T. Satani;Y. Matsui;F. Sato;Y. Kato;T. Iida
我们研制了一种大口径电子回旋共振（ECR）离子源，该离子源具有圆柱梳状磁场结构，可实现高电流密度和相对大口径的离子束，可用于低气压和低微波功率下的束流处理。结果表明，梳状磁场对等离子体的约束比简单多极磁场更有效。我们已经建造了一个大口径离子束引出器，并安装在ECR离子源上。在低气压0.03 Pa和低微波功率200 W下，电子密度达到1017 <$18 m-3量级，离子饱和电流密度约为80 <$100 A/m2。我们进行了ECR离子源离子束引出的首次试验。我们调查的离子束特性的提取电压和Ar气体压力。引出离子束流与引出电压成正比地增加，但目前的束流低于由离子饱和电流估算的束流。
We have developed a large bore electron cyclotron resonance (ECR) ion source with cylindrically comb‐shaped magnetic field configuration to realize high current density and comparatively large bore ion beam which can be used for beam processes under low pressure and low microwave power. It is found that the plasma confinement of cylindrically comb‐shaped magnetic fields is more effective than that of simple multipole magnetic fields. We have constructed a large bore ion beam extractor and set to the ECR ion source. The electron density attained to 1017∼18 m−3 order, ion saturation current density is about 80∼100 A/m2 under low pressure 0.03 Pa and low microwave power 200 W. We conduct the first trial of ion beam extraction from the ECR ion source. We investigate the ion beam characteristics for extraction voltages and Ar gas pressures. The extracted ion beam current increases in proportion to extraction voltages, however at present the beam current is lower than those estimated from ion saturation current...