Single Diallyamine Type Copolymer Additive Which Perfectly Bottom-up Fills Cu Electrodeposition
Single Diallyamine Type Copolymer Additive Which Perfectly Bottom-up Fills Cu Electrodeposition
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单一二烯丙胺型共聚物添加剂,完美自下而上填充铜电沉积
DOI:
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发表时间:
2011
期刊:
影响因子:
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通讯作者:
T. saito
中科院分区:
文献类型:
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作者:
M. Takeuchi;K. Kondo;H. Kuri;M. Bunya;N. Okamoto;T. saito