Proposal of Low-Loss Non-Volatile Mid-Infrared Optical Phase Shifter Based on Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>3</sub>S<sub>2</sub>
Proposal of Low-Loss Non-Volatile Mid-Infrared Optical Phase Shifter Based on Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>3</sub>S<sub>2</sub>
复制标题
基于Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>3</sub>S<sub>2</的低损耗非易失性中红外光学移相器的提出
DOI：
10.1109/ted.2023.3235865
复制
发表时间：
2023
影响因子：
3.1
通讯作者：
Takenaka Mitsuru
中科院分区：
文献类型：
--
作者：
Miyatake Yuto;Makino Kotaro;Tominaga Junji;Miyata Noriyuki;Nakano Takashi;Okano Makoto;Toprasertpong Kasidit;Takagi Shinichi;Takenaka Mitsuru
基于相变材料 (PCM) 的光学移相器是在硅光子平台上以中红外 (MIR) 波长运行的量子光子集成电路 (QPIC) 的一种有前途的构建模块。在本文中，我们提出了一种基于 Ge2Sb2Te3S2 (GSTS) 的、在 MIR 波长下工作的创纪录的低损耗非易失性 PCM 移相器，这是一种新型的无硒宽禁带 PCM。基于光谱椭圆光度法测量的折射率和消光系数光谱，我们表明GSTS对于光学移相器具有优异的材料特性。通过在 MIR 范围内使用 GSTS，可以显着降低 PCM 移相器的光吸收。我们实现了 0.29 dB 的非相移光学损耗，这是迄今为止与 Si 波导集成的 PCM 移相器所报道的最低损耗。我们还演示了具有 GSTS 移相器的微环谐振器 (MRR) 的非易失性谐振波长调谐以及基于激光照射的 GSTS 移相器的光诱导相变。
An optical phase shifter based on phase-change materials (PCMs) is a promising building block of quantum photonic integrated circuits (QPICs) operating at mid-infrared (MIR) wavelengths on a Si photonics platform. In this article, we propose a record low-loss non-volatile PCM phase shifter operating at MIR wavelengths based on Ge2Sb2Te3S2 (GSTS), which is a new Se-free widegap PCM. On the basis of the refractive index and extinction coefficient spectra measured by spectroscopic ellipsometry, we show that GSTS has excellent material properties for optical phase shifters. By using GSTS in the MIR range, the optical absorption of a PCM phase shifter can be considerably reduced. We achieved an optical loss of 0.29 dB for aphase shift, which is the lowest loss ever reported for a PCM phase shifter integrated with a Si waveguide. We also demonstrate the non-volatile resonance wavelength tuning of a microring resonator (MRR) with a GSTS phase shifter and the optically induced phase transition of a GSTS phase shifter based on laser irradiation.