On elastic relaxation and long wavelength microstructures in spinodally decomposed InxGa1-x.AsyP1-y epitaxial layers
On elastic relaxation and long wavelength microstructures in spinodally decomposed InxGa1-x.AsyP1-y epitaxial layers
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旋节线分解 InxGa1-x.AsyP1-y 外延层的弹性弛豫和长波长微结构
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发表时间：
1985
期刊：
影响因子：
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通讯作者：
A. Howie
中科院分区：
文献类型：
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作者：
M. Treacy;J. Gibson;A. Howie
摘要：对在调幅分解的 In Ga1−x As y P1−y 合金的透射电子显微镜研究中观察到的长波长（100–300 nm）准周期微观结构的起源进行了研究。这种对比可以通过薄化样品表面附近的晶格平面弯曲产生的衍射效应得到很好的解释，例如伴随着准周期晶格调制的剪切应力的弹性弛豫所引起的衍射效应。计算对比和实验对比之间出色的定性一致性证明了这样的说法：在液相外延生长的 InxGa1−xAs y P1−y 合金的部分成分范围内观察到的这些对比与旋节线分解有关。伴随的应变调制幅度为 10−3 量级。建议这种材料中较小尺度（5-15 nm）的散斑对比度也可能与成分变化有关。更一般地说，成分调制中近表面弹性松弛的性质......
Abstract The origin of the long-wavelength (100–300 nm) quasi-periodic microstructure observed in transmission electron microscopy studies of spinodally decomposed In Ga1−x As y P1−y alloys has been investigated. The contrast is well explained by diffraction effects arising from lattice plane bending near the surfaces of the thinned specimens, such as would be induced by elastic relaxation of shear stresses accompanying a quasi-periodic lattice modulation. Excellent qualitative agreement between calculated and experimental contrasts lends weight to the claim that these contrasts, observed over part of the composition range of liquid phase epitaxy grown InxGa1−xAs y P1−y alloys, are associated with spinodal decomposition. The accompanying strain modulation amplitude is of the order of 10−3. It is suggested that speckle contrast on a smaller scale (5–15 nm) in this material may also be related to composition variations. More generally, the nature of near-surface elastic relaxation in compositionally modulat...