High-resolution energy-dispersive x-ray spectroscopic analysis of ultrathin ion diffusion barriers using microcalorimetry
High-resolution energy-dispersive x-ray spectroscopic analysis of ultrathin ion diffusion barriers using microcalorimetry
复制标题
使用微量热法对超薄离子扩散屏障进行高分辨率能量色散 X 射线光谱分析
DOI：
10.1063/1.1415762
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发表时间：
2002
影响因子：
3.2
通讯作者：
D. Wollman
中科院分区：
文献类型：
--
作者：
R. Geer;D. Wu;D. Wollman
X 射线探测器微量热法的出现为适用于纳米级器件和结构的高分辨率成分微量分析带来了希望。为了证明这种能力，基于微量热计的能量色散 X 射线光谱 (EDS) 已用于分析正在开发的超薄 TaSiN 薄膜，作为 0.1 μm 以下集成电路互连结构中的离子扩散阻挡层。使用基于微量热法的 EDS 对 TaSiN 薄膜进行了微量分析，以便与使用传统 Si(Li) EDS 探测器获得的类似数据进行比较。对于薄至 3.5 nm 的薄膜的 TaSiN EDS 光谱，证明了微热量计 X 射线探测器改进的能量分辨率所提供的元素峰重叠的消除。此外，还检查了电子探针束能量的变化，以减少相对于 TaSiN 膜厚度的 X 射线产生量。结果表明，基于微量热仪的 EDS 是一种潜在的强大技术，可用于表征...
The advent of microcalorimetry for x-ray detectors holds the promise for high-resolution compositional microanalysis applicable to nanometer-scale devices and structures. To demonstrate this capability, microcalorimeter-based energy dispersive x-ray spectroscopy (EDS) has been used to analyze ultrathin TaSiN films under development as ion diffusion barriers in sub-0.1 μm integrated circuit interconnect structures. Microanalysis of TaSiN films has been carried out using microcalorimetry-based EDS for comparison with similar data acquired using conventional Si(Li) EDS detectors. The elimination of elemental peak overlaps provided by the improved energy resolution of the microcalorimeter x-ray detector is demonstrated for TaSiN EDS spectra from films as thin as 3.5 nm. In addition, variation of the electron probe beam energy is examined to reduce the x-ray generation volume relative to the TaSiN film thickness. It is shown that microcalorimetery-based EDS is a potentially powerful technique for the character...