Parametrically amplified thermal resonant sensor with pseudo-cooling effect
Parametrically amplified thermal resonant sensor with pseudo-cooling effect
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DOI：
10.1088/0960-1317/15/12/010
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发表时间：
2005-12
影响因子：
2.3
通讯作者：
T. Ono;H. Wakamatsu;M. Esashi
中科院分区：
文献类型：
--
作者：
T. Ono;H. Wakamatsu;M. Esashi
本文提出了一种基于机械参数放大的具有热噪声去放大能力的谐振热传感器。单晶硅谐振器形成在由窄梁自由悬挂的吸收体的边缘处，谐振器的谐振频率通过照射红外辐射时的热传导和热应力而改变。集成了用于在谐振频率附近静电振动的电极，并且在谐振器附近还形成了用于静电激励参量放大的两个电极。我们提出了一种方案，在适当的条件下，通过参数放大涉及的噪声压缩来减少机械振动的频率波动，从而提高噪声等效功率和归一化检测率。在本研究中，为了验证噪声压缩方案，制作了热谐振红外传感器原型，并确认了谐振器中当前的参数谐振与噪声压缩，并报告了原型的基本特性。
In this paper, a resonating thermal sensor with the capability of de-amplifying thermal noises based on mechanical parametric amplification is presented. A single-crystalline silicon resonator is formed at the edge of an absorber that is freely suspended by narrow beams, and the resonant frequency of the resonator is changed by both heat conduction and thermal stress in irradiating IR radiation. An electrode for electrostatically vibrating near the resonant frequency is integrated, and two electrodes for electrostatically exciting parametric amplification are also formed near the resonator. We propose a scheme in which the frequency fluctuation of the mechanical vibration can be reduced by noise-squeezing involved in parametric amplification under an appropriate condition, resulting in improvement of the noise equivalent power and normalized detectivity. In this research, the prototype of thermal resonant IR sensors was fabricated in order to verify the scheme of the noise-squeezing, and currently parametric resonance with the noise-squeezing in the resonator is confirmed and the fundamental characteristics of the prototype are reported.