Closed form solutions for the pull-in voltage of micro curled beams subjected to electrostatic loads
Closed form solutions for the pull-in voltage of micro curled beams subjected to electrostatic loads
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DOI：
10.1088/0960-1317/16/3/021
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发表时间：
2006-03
影响因子：
2.3
通讯作者：
Yuh-Chung Hu
中科院分区：
文献类型：
--
作者：
Yuh-Chung Hu
本文推导了静电载荷作用下微卷曲梁的全阶、四阶和三阶解析模型，以及相应的闭合形式解。基于欧拉-伯努利梁理论和泰勒级数展开导出了解析模型，然后用能量法求解。通过与以往的分析模型和以往工作中的实验测量数据的比较，验证了模型的准确性。结果表明，本文所提出的闭型解比以往的解更精确。本文还比较了三种常用的假定挠度形状函数，表明梁的自然模态是预测拉入电压的最佳选择。目前的闭合形式的拉入电压解非常方便和精确，可以在器件设计中实现。
This paper derives three analytical models, namely the full-order, the fourth-order and the third-order models, and the corresponding closed form solutions for the pull-in voltages of micro curled beams subjected to electrostatic loads. The analytical models are derived based on the Euler–Bernoulli beam theory and Taylor's series expansion and are then solved by the energy method. The accuracy of the present models is verified through comparing with former analytical models and the experimentally measured data conducted in former works. It is verified that the present closed form solutions are more accurate than past works. This paper also compares three commonly used assumed deflection shape functions and shows that the natural mode of the beam is the best choice in predicting the pull-in voltage. The present closed form solutions for the pull-in voltage are very convenient and accurate enough for implementation in device design.