Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator
Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator
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DOI：
10.1088/0960-1317/19/7/074003
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发表时间：
2009-07-01
影响因子：
2.3
通讯作者：
Seshia, Ashwin A.
中科院分区：
文献类型：
--
作者：
Lee, Joshua E-Y;Yan, Jize;Seshia, Ashwin A.
本文报道了一种单晶硅微机械方板谐振器的设计和电学特性。该微谐振器在5.166 MHz的反对称酒杯模式下被激发，在33 mtorr的压力下显示出令人印象深刻的质量因子(Q) 3.7 x 10(6)。该装置已在商业铸造工艺中制造。由于谐振器的超高Q值，在直流偏置电压为60 V的情况下，测量到2 μ m的转导间隙的相关运动电阻约为50 k ω。该结果对应于1.9 x 10（13）的频率- q乘积，这是基模单晶硅谐振器的最高报道，与一些最好的石英晶体谐振器相当。结果表明了硅作为机械材料的优越性能，并表明酒杯谐振模式有利于实现材料极限允许的高质量因素。
This paper reports on the design and electrical characterization of a single crystal silicon micromechanical square-plate resonator. The microresonator has been excited in the anti-symmetrical wine glass mode at a resonant frequency of 5.166 MHz and exhibits an impressive quality factor (Q) of 3.7 x 10(6) at a pressure of 33 mtorr. The device has been fabricated in a commercial foundry process. An associated motional resistance of approximately 50 k Omega using a dc bias voltage of 60 V is measured for a transduction gap of 2 mu m due to the ultra-high Q of the resonator. This result corresponds to a frequency-Q product of 1.9 x 10(13), the highest reported for a fundamental mode single-crystal silicon resonator and on par with some of the best quartz crystal resonators. The results are indicative of the superior performance of silicon as a mechanical material, and show that the wine glass resonant mode is beneficial for achieving high quality factors allowed by the material limit.