Dependence of c-plane sapphire misorientation angle in high temperature AlN growth and specific step bunching at large angle

Dependence of c-plane sapphire misorientation angle in high temperature AlN growth and specific step bunching at large angle
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高温AlN生长中c面蓝宝石取向差角的依赖性和大角度特定台阶聚束

DOI:
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发表时间:
2022
期刊:
影响因子:
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通讯作者:
Yoshiki Naoi and Kentaro Nagamatsu
Yoshiki Naoi and Kentaro Nagamatsu
中科院分区:
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文献类型:
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作者:
Takumi Miyagawa;Atsushi Tomita;Shota Tsuda;Hideki Hirayama;Yuusuke Takashima;Yoshiki Naoi and Kentaro Nagamatsu

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