Detection of hydrogen atoms in silane plasmas using laser-induced fluorescence by Lyman-alpha two-photon and simultaneous Balmer-alpha excitations
Detection of hydrogen atoms in silane plasmas using laser-induced fluorescence by Lyman-alpha two-photon and simultaneous Balmer-alpha excitations
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利用莱曼-α 双光子和同时巴尔默-α 激发的激光诱导荧光检测硅烷等离子体中的氢原子
DOI：
10.1116/1.580457
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
M. Maeda
中科院分区：
文献类型：
--
作者：
K. Miyazaki;T. Kajiwara;K. Uchino;K. Muraoka;T. Okada;M. Maeda
用243 nm的基态(主量子数n=1)到n=2态的双光子激发、656 nm的n=2态到n=3态的同时激发和656 nm的荧光观测，测量了硅烷等离子体中的氢原子密度。首先，研究了激光在硅烷等离子体中诱导分子和自由基解离对氢原子测量的影响。在流量为5sccm、气压为11Pa、射频功率为2W的硅烷等离子体中，测得氢原子的绝对密度为(5±2)×1017m−3。
Measurements of atomic hydrogen densities in silane plasmas were accomplished using a two-photon excitation from the ground state (principal quantum number n=1) to the n=2 state at 243 nm, a simultaneous excitation from the n=2 state to the n=3 state at 656 nm, and an observation of fluorescence at 656 nm. First, the influence of the laser-induced dissociation of molecules and radicals in silane plasmas on measurements of hydrogen atoms during the application of this excitation scheme was investigated. Then, we determined the absolute density of hydrogen atoms to be (5±2)×1017 m−3 in a silane plasma at a flow rate of 5 sccm, a pressure of 11 Pa and a rf power of 2 W.