Maskless digital manufacturing of organic thin film transistor by femtosecond laser direct patterning
Maskless digital manufacturing of organic thin film transistor by femtosecond laser direct patterning
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飞秒激光直接图案化无掩模数字化制造有机薄膜晶体管
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
S. Ko
中科院分区：
文献类型：
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作者：
S. Ko
小批量、大品种的单件制造已被公认为满足客户多样化需求的下一代制造方案。作为一种很有前途的制造技术，基于激光的无掩模数字图形技术是近年来出现的一种新技术。特别是，在玻璃和柔性聚合物等各种衬底上制备金属纳米颗粒，对于各种电子器件的应用已经变得非常重要。在本研究中，我们利用飞秒激光直接烧结金属纳米晶来制备有机薄膜晶体管。这是一种超高分辨率的直接金属图案化方法，用飞秒激光烧结金属纳米晶体，形成高质量的金属电极，用于以并五苯为有源层的底栅有机薄膜晶体管。有机薄膜晶体管显示了良好的性能，迁移率高达0.0173厘米~2/伏。这些结果表明，飞秒激光烧结金属纳米晶在电子领域具有广阔的应用前景。
The small volume, large variety item manufacturing has been recognized as a next generation manufacturing scheme to satisfy the various demands from the customers. As a promising manufacturing technique, laser based maskless digital patterning emerged recently. Especially, the fabrication of metal nanopatterns on various substrates, such as glass and flexible polymers, has become important for various electronic device applications. In this study, we used the direct femtosecond laser sintering of metal nanocrystals to fabricate organic thin-film transistors. This process is an ultra-high-resolution direct metal patterning method in which the metal nanocrystals are sintered with a femtosecond laser beam to form high quality metal electrodes for the bottom gated organic thin film transistors with pentacene as an active layer. Organic thin-film transistors with PFBT treatments were demonstrated showing good performance with the mobility up to 0.0173 cm2/Vs. These results indicate that the femtosecond laser sintering of metal nanocrystals can be applied to numerous applications in electronics.