A Method of Acoustic Reflectivity Measurement using Ultrasonic Waves and Its Change due to Stress Cycles in Surface Bonded Copper Film
A Method of Acoustic Reflectivity Measurement using Ultrasonic Waves and Its Change due to Stress Cycles in Surface Bonded Copper Film
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超声波声反射率测量方法及其随表面粘合铜膜应力循环的变化
DOI:
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发表时间:
2006
期刊:
影响因子:
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通讯作者:
K.
中科院分区:
文献类型:
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作者:
Oka T.;Torii T.;Matsuba A.;Shimizu;K.