Self-powered triboelectric MEMS accelerometer
Self-powered triboelectric MEMS accelerometer
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DOI：
10.1016/j.nanoen.2023.108282
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发表时间：
2023-05
期刊：
影响因子：
17.6
通讯作者：
Mohammad Alzgool;Yu Tian;B. Davaji;Shahrzad Towfighian
中科院分区：
文献类型：
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作者：
Mohammad Alzgool;Yu Tian;B. Davaji;Shahrzad Towfighian
提出了一种小型化至微米级的自供电摩擦电加速度计。该微型摩擦电加速度计 (MTEA) 采用 CMOS 兼容工艺制造。该设计遵循介观尺度的摩擦纳米发电机，并以接触分离模式运行。这种按比例缩小的多层设计使得能够使用微机电系统 (MEMS) 技术进行制造。 MTEA 使用铝和聚酰亚胺摩擦电对制成，可在触点上产生电荷。制作2mm×2mm的方形可动板，厚度1μm。然后，用已知频率（0.1-7 kHz）和加速度（1-10 g）的微型振动器激发所制造的 MTEA，并记录输出。谐振频率 (700 Hz) 下的输出为 0.7 V。产生的电压与加速度呈线性关系，在 700 Hz 激励频率下最大灵敏度为 70 mV/g。
A self-powered triboelectric accelerometer miniaturized to the micro-scale is presented. This micro triboelectric accelerometer (MTEA) was fabricated using CMOS-compatible processes. The design followed the triboelectric nanogenerators made in meso-scale and operates in the contact-separation mode. The scaled-down, multilayer design enabled fabrication using microelectromechanical systems (MEMS) technology. The MTEA was made using an aluminum and polyimide triboelectric pair that generated charges on the contact. A square movable plate that is 2 mm× 2 mm was fabricated with 1 μ m thickness. Then, the fabricated MTEA was excited by a mini-shaker at known frequencies (0.1–7 kHz) and accelerations (1–10 g), and the output was recorded. The output was 0.7 V at the resonance frequency (700 Hz). The generated voltage has a linear relationship with the acceleration with a maximum sensitivity of 70 mV/g at the 700 Hz excitation frequency.