Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si–B–C–N coatings
Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si–B–C–N coatings
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DOI：
10.1016/j.surfcoat.2008.07.025
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发表时间：
2008-12
影响因子：
5.4
通讯作者：
J. Čapek;S. Hřeben;P. Zeman;J. Vlček;R. Čerstvý;J. Houška
中科院分区：
文献类型：
--
作者：
J. Čapek;S. Hřeben;P. Zeman;J. Vlček;R. Čerstvý;J. Houška
The effect of the gas mixture composition on the high-temperature behavior of amorphous Si–B–C–N coatings was systematically investigated up to 1700 °C in a flowing air and inert gases (He and Ar). The Si–B–C–N coatings were deposited by reactive dc magnetron co-sputtering using a single B4C–Si target in two nitrogen–argon gas mixtures (50% N2+50% Ar or 25% N2+75% Ar). A fixed 75% Si fraction in the target erosion area, an rf induced negative substrate bias voltage of −100 V, a substrate temperature of 350 °C and a total pressure of 0.5 Pa were held constant in depositions. The high-temperature behavior of the coatings, including their oxidation resistance in air and thermal stability in inert gases, was characterized by means of high-resolution thermogravimetry, differential scanning calorimetry, X-ray diffraction, Rutherford backscattering spectrometry and elastic recoil detection analysis. It was found that the Ar fraction in the gas mixture determines an important N/(Si+B+C) concentration ratio in the coatings, and hence their high-temperature behavior. The coating prepared with a 50% Ar fraction exhibits extremely high oxidation resistance (Δm=0) up to 1400 °C and very high oxidation resistance (Δm<0.02 mg/cm2) up to 1600 °C in air, and extremely high thermal stability up to 1600 °C in inert gases. The stability of the coating prepared with a 75% Ar fraction is very high up to the onset (at about 1250 °C) of crystallization of its initial amorphous structure.
