Fabrication of Multiple Micro-Grooves by Ultrasonic Machining with a Tool that Laminated Thin Hard-Material and Thin Soft-Material
Fabrication of Multiple Micro-Grooves by Ultrasonic Machining with a Tool that Laminated Thin Hard-Material and Thin Soft-Material
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DOI：
10.4028/www.scientific.net/amr.76-78.577
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发表时间：
2009-06
期刊：
影响因子：
--
通讯作者：
J. Shinozuka
中科院分区：
文献类型：
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作者：
J. Shinozuka
设计了一种利用层压刀具进行超声微开槽加工的方法。超声刀具尖端的薄壁可以通过一次超声加工在工件上制造出许多沟槽。然而，用于制造微槽的薄壁造成了刀具刚度的不足，导致开槽困难。然后用一种柔软的材料（如聚合物塑料）包裹墙壁，以补充刚度的不足。由于软质材料吸收了超声振动的能量，磨料颗粒在软质材料作用下对工件表面的冲击损伤很小。因此，利用薄的硬材料和薄的软材料交替层压的层压工具可以高效地制造多个微槽。本文研制了以薄板为硬材料，环氧胶粘剂为软材料的复合工具。在氧化铝陶瓷上进行了平行凹槽的制备实验。本文研究了超声加工中磨料颗粒的粒度、刀-工件接触区域的静加工载荷或静正应力以及开槽时间等参数对微槽特性的影响。结果表明，开槽效率与开槽时间和静法向应力有关。最后，给出了一些应用。
A micro-grooving method by ultrasonic machining with a lamination tool has been devised. Thin walls on the tip of an ultrasonic tool can fabricate many grooves on a workpiece by one ultrasonic-machining process. Thinner wall for fabricating micro grooves, however, poses the lack of the stiffness of the tool, resulting in the difficulty of the grooving. Then the walls are enfolded with a soft material such as a polymer plastic to supplement the lack of the stiffness. Since soft material absorbs the energy of the ultrasonic vibration, the damage by the impacts of the abrasive particle on the workpiece surface under the soft material is little. Therefore multiple micro-grooves can fabricate efficiently by using of a lamination tool in which thin hard-materials and thin soft-materials are laminated alternately. In this paper, the lamination tools were developed with a thin shim-sheet as the hard material and an epoxy adhesive as the soft material. The fabrication experiments of the parallel grooves on alumina ceramics were conducted. This paper investigates the influences of the parameters of ultrasonic machining such as the grain size of the abrasive particle, the static machining load or static normal stress applied to the tool-workpiece contact region and the grooving time upon the characteristics of the micro-grooves. The results show that the grooving efficiency depends on the grooving time and the static normal stress. Finally, some applications are shown.