The thermodynamic properties of tetraethoxysilane (TEOS) and an infrared study of its thermal decomposition
The thermodynamic properties of tetraethoxysilane (TEOS) and an infrared study of its thermal decomposition
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四乙氧基硅烷(TEOS)的热力学性质及其热分解的红外研究
DOI:
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发表时间:
1993
期刊:
影响因子:
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通讯作者:
R. Konings
中科院分区:
文献类型:
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作者:
M. Vis;E. Cordfunke;R. Konings
A review is given on the determination of the thermodynamic properties of Si(OC 2 H 5 ) 4 (TEOS, tetraethoxysilane). In addition, the thermal decomposition of TEOS has been studied by in-situ IR spectroscopy. The decomposition products in the gas phase in the absence of oxygen are organic fragments (ethanol, ethanal, ethene, methane, carbon monoxide), and in the presence of oxygen water, carbon dioxide, ethanal and methanal. The results are compared with thermodynamic equilibrium calculations and kinetic models