Two-dimensional spectral signal model for chromatic confocal microscopy
Two-dimensional spectral signal model for chromatic confocal microscopy
复制标题
彩色共焦显微镜的二维光谱信号模型
DOI：
10.1364/oe.418924
复制
发表时间：
2021
期刊：
影响因子：
3.8
通讯作者：
Wenlong Lu
中科院分区：
文献类型：
--
作者：
Cheng Chen;Richard Leach;Jian Wang;Xiaojun Liu;Xiangqian Jiang;Wenlong Lu
在彩色共焦显微镜中，信号特性影响信号处理的精度，这反过来又决定了测量性能。因此，充分了解光谱特性是提高测量性能的关键。现有的光谱模型只描述了信号的强度-波长特性，没有考虑位移-波长关系。这些模型需要光学设计的先验知识，这降低了光学设计过程的有效性。在本文中，我们开发了一个二维光谱信号模型来描述的信号强度波长位移特性的彩色共焦显微镜的光学设计布局的先验知识。利用该模型，研究了共焦系统的尺寸特性、单色物镜的位移-波长特性和单色像差对系统的影响。实验结果表明，我们的信号模型的有效性。使用我们的模型，光谱信号的进一步评估可以用来提高彩色共焦显微镜的测量性能。
In chromatic confocal microscopy, the signal characteristics influence the accuracy of the signal processing, which in turn determines measurement performance. Thus, a full understanding of the spectral characteristics is critical to enhance the measurement performance. Existing spectral models only describe the signal intensity-wavelength characteristics, without taking the displacement-wavelength relation into consideration. These models require prior.knowledge of the optical design, which reduces the effectiveness in the optical design process. In this paper, we develop a two-dimensional spectral signal model to describe the signal intensity-wavelength-displacement characteristics in chromatic confocal microscopy without prior knowledge of the optical design layout. With this model, the influence of the dimensional characteristics of the confocal setup and the displacement-wavelength characteristics and.monochromatic aberrations of the hyperchromatic objective are investigated. Experimental results are presented to illustrate the effectiveness of our signal model. Using our model, further evaluation of the spectral signal can be used to enhance the measurement performance of.chromatic confocal microscopy.