Room-temperature synthesis of crystalline barium titanate thin films by high-concentration sol–gel method
Room-temperature synthesis of crystalline barium titanate thin films by high-concentration sol–gel method
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DOI：
10.1016/s0022-3093(00)00101-0
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发表时间：
2000-06
影响因子：
3.5
通讯作者：
H. Matsuda;N. Kobayashi;Takeshi Kobayashi;K. Miyazawa;M. Kuwabara
中科院分区：
文献类型：
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作者：
H. Matsuda;N. Kobayashi;Takeshi Kobayashi;K. Miyazawa;M. Kuwabara
采用溶胶-凝胶法，以高浓度的Ba-和Ti-醇盐前驱体溶液为原料，在50°C下在玻璃衬底上成功地一步合成了厚度为500 nm的BaTiO 3多晶薄膜。该膜具有良好的质量，具有无裂纹的光滑表面。BaTiO_3低温晶化的关键过程是凝胶膜在密封槽中的水雾和醇雾中的老化过程。水雾可以减缓水解，并且醇雾可以稳定反应性钛醇盐以使反应速率与Ba醇盐的反应速率相关联。这两种效应都可能导致醇盐结晶成BaTiO 3钙钛矿，而不是单独水解。干燥和烧制的膜在350-2600 nm的波长范围内显示出光学透射光谱，在350 nm处具有尖锐的吸收边，并且从干涉条纹估计可见光区域的折射率n=2.0。
We have succeeded in single-step synthesis of polycrystalline BaTiO3thin film on glass substrate with the thickness of 500 nm at 50°C by newly established sol–gel method starting from high-concentration Ba- and Ti-alkoxide precursor solutions. The film was in good quality with a crack-free, smooth surface. The key process of crystallization of BaTiO3at low temperature was the aging of gel film in a mist of water and alcohol in a sealed cell. The water mist may slow hydrolysis and the alcohol mist may stabilize the reactive Ti-alkoxide to associate the reaction rate with that of Ba-alkoxide. Both effects may lead the alkoxides to crystallize into BaTiO3perovskite instead of being hydrolyzed separately. The dried and fired films showed optical transmission spectra in the wavelength range of 350–2600 nm with sharp absorption edge at 350 nm and the refractive index n=2.0 in the visible light region was estimated from the interference fringes.